A robust computational algorithm for inverse photomask synthesis in optical projection lithography

Siu-Kai Choy, Ningning Jia, Chong-Sze Tong, Man Lai Tang, Edmond Lam

Research output: Contribution to journal › Article › peer-review

15 Citations (Scopus)

Original language	English
Pages (from-to)	625 - 651
Journal	SIAM Journal on Imaging Sciences
Volume	5
Publication status	Published - 2012

Cite this

@article{a6ed4282f2e24d8ba041532c4819a59f,

title = "A robust computational algorithm for inverse photomask synthesis in optical projection lithography",

author = "Siu-Kai Choy and Ningning Jia and Chong-Sze Tong and Tang, \{Man Lai\} and Edmond Lam",

year = "2012",

language = "English",

volume = "5",

pages = "625 -- 651",

journal = "SIAM Journal on Imaging Sciences",

}