Abstract
A novel beam-forming and delivery technique for high-power laser beams for the generation of well-defined intensity distributions based on diffractive optical elements is reported. It will be shown that nonlinear beam distortions can be minimized by applying this technique in the field of femtosecond-laser-basedmicro-machining. As a concrete example, the production of high-quality holes in metallic workpieces at atmospheric pressure will be discussed.
| Original language | English |
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| Pages (from-to) | 517-20 |
| Journal | Applied Physics A: Materials Science and Processing |
| Volume | 67 |
| Issue number | 5 |
| DOIs | |
| Publication status | Published - 1998 |