Dynamic optical characterization of NEMS resonators

L. Coudron; F. Casset; C. Durand; P. Renaux; E. Ollier; D. Bloch; P. Vairac

doi:10.1109/SMIC.2008.33

Dynamic optical characterization of NEMS resonators

L. Coudron, F. Casset, C. Durand, P. Renaux, E. Ollier, D. Bloch, P. Vairac

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

1 Citation (Scopus)

Abstract

The small sizes of the MEMS or NEMS electromechanical resonators and their single wafer, multi frequencies possibilities has focused tremendous interest in the development of demonstrators using standard CMOS process. But sizes reduction induces output signal detection challenge. This paper deals with the dynamic characterization of NEMS. Heterodyne interferometric measurements are performed on beam and plate resonators obtained using the Silicon on Nothing (SoN) process. We obtained respectively 6.6 and 10.5 MHz resonant frequency for these devices, in correlation with ANSYS simulation predictions. Dynamic optical characterization seems to be a promising method to study nanoelectromechanical devices in the aim to enhance their performances.

Original language	English
Title of host publication	Procs 2008 IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF System
Editors	W. J. Chappell
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	106-109
Number of pages	4
ISBN (Electronic)	978-1-4244-1856-5
ISBN (Print)	978-1-4244-1855-8
DOIs	https://doi.org/10.1109/SMIC.2008.33
Publication status	Published - 2008
Event	8th IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF 2008) - Orlando Duration: 23 Jan 2008 → 25 Jan 2008

Conference

Conference	8th IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF 2008)
City	Orlando
Period	23/01/08 → 25/01/08

Keywords

characterization
heterodyne interferometry
NEMS
optical
resonator

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10.1109/SMIC.2008.33

Cite this

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title = "Dynamic optical characterization of NEMS resonators",

abstract = "The small sizes of the MEMS or NEMS electromechanical resonators and their single wafer, multi frequencies possibilities has focused tremendous interest in the development of demonstrators using standard CMOS process. But sizes reduction induces output signal detection challenge. This paper deals with the dynamic characterization of NEMS. Heterodyne interferometric measurements are performed on beam and plate resonators obtained using the Silicon on Nothing (SoN) process. We obtained respectively 6.6 and 10.5 MHz resonant frequency for these devices, in correlation with ANSYS simulation predictions. Dynamic optical characterization seems to be a promising method to study nanoelectromechanical devices in the aim to enhance their performances.",

keywords = "characterization, heterodyne interferometry, NEMS, optical, resonator",

author = "L. Coudron and F. Casset and C. Durand and P. Renaux and E. Ollier and D. Bloch and P. Vairac",

year = "2008",

doi = "10.1109/SMIC.2008.33",

language = "English",

isbn = "978-1-4244-1855-8",

pages = "106--109",

editor = "Chappell, {W. J.}",

booktitle = "Procs 2008 IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF System",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

address = "United States",

note = "8th IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF 2008) ; Conference date: 23-01-2008 Through 25-01-2008",

}

Coudron, L, Casset, F, Durand, C, Renaux, P, Ollier, E, Bloch, D & Vairac, P 2008, Dynamic optical characterization of NEMS resonators. in WJ Chappell (ed.), Procs 2008 IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF System . Institute of Electrical and Electronics Engineers (IEEE), pp. 106-109, 8th IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF 2008), Orlando, 23/01/08. https://doi.org/10.1109/SMIC.2008.33

Dynamic optical characterization of NEMS resonators. / Coudron, L.; Casset, F.; Durand, C. et al.
Procs 2008 IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF System . ed. / W. J. Chappell. Institute of Electrical and Electronics Engineers (IEEE), 2008. p. 106-109.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Dynamic optical characterization of NEMS resonators

AU - Coudron, L.

AU - Casset, F.

AU - Durand, C.

AU - Renaux, P.

AU - Ollier, E.

AU - Bloch, D.

AU - Vairac, P.

PY - 2008

Y1 - 2008

N2 - The small sizes of the MEMS or NEMS electromechanical resonators and their single wafer, multi frequencies possibilities has focused tremendous interest in the development of demonstrators using standard CMOS process. But sizes reduction induces output signal detection challenge. This paper deals with the dynamic characterization of NEMS. Heterodyne interferometric measurements are performed on beam and plate resonators obtained using the Silicon on Nothing (SoN) process. We obtained respectively 6.6 and 10.5 MHz resonant frequency for these devices, in correlation with ANSYS simulation predictions. Dynamic optical characterization seems to be a promising method to study nanoelectromechanical devices in the aim to enhance their performances.

AB - The small sizes of the MEMS or NEMS electromechanical resonators and their single wafer, multi frequencies possibilities has focused tremendous interest in the development of demonstrators using standard CMOS process. But sizes reduction induces output signal detection challenge. This paper deals with the dynamic characterization of NEMS. Heterodyne interferometric measurements are performed on beam and plate resonators obtained using the Silicon on Nothing (SoN) process. We obtained respectively 6.6 and 10.5 MHz resonant frequency for these devices, in correlation with ANSYS simulation predictions. Dynamic optical characterization seems to be a promising method to study nanoelectromechanical devices in the aim to enhance their performances.

KW - characterization

KW - heterodyne interferometry

KW - NEMS

KW - optical

KW - resonator

U2 - 10.1109/SMIC.2008.33

DO - 10.1109/SMIC.2008.33

M3 - Conference contribution

SN - 978-1-4244-1855-8

SP - 106

EP - 109

BT - Procs 2008 IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF System

A2 - Chappell, W. J.

PB - Institute of Electrical and Electronics Engineers (IEEE)

T2 - 8th IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF 2008)

Y2 - 23 January 2008 through 25 January 2008

ER -

Dynamic optical characterization of NEMS resonators

Abstract

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Keywords

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