Dynamic optical characterization of NEMS resonators

L. Coudron, F. Casset, C. Durand, P. Renaux, E. Ollier, D. Bloch, P. Vairac

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

The small sizes of the MEMS or NEMS electromechanical resonators and their single wafer, multi frequencies possibilities has focused tremendous interest in the development of demonstrators using standard CMOS process. But sizes reduction induces output signal detection challenge. This paper deals with the dynamic characterization of NEMS. Heterodyne interferometric measurements are performed on beam and plate resonators obtained using the Silicon on Nothing (SoN) process. We obtained respectively 6.6 and 10.5 MHz resonant frequency for these devices, in correlation with ANSYS simulation predictions. Dynamic optical characterization seems to be a promising method to study nanoelectromechanical devices in the aim to enhance their performances.

Original languageEnglish
Title of host publicationProcs 2008 IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF System
EditorsW. J. Chappell
PublisherIEEE COMPUTER SOC
Pages106-109
Number of pages4
ISBN (Electronic) 978-1-4244-1856-5
ISBN (Print)978-1-4244-1855-8
DOIs
Publication statusPublished - 2008
Event8th IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF 2008) - Orlando
Duration: 23 Jan 200825 Jan 2008

Conference

Conference8th IEEE Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems (SiRF 2008)
CityOrlando
Period23/01/0825/01/08

Keywords

  • characterization
  • heterodyne interferometry
  • NEMS
  • optical
  • resonator

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