Dynamic optical characterization of NEMS resonators

Keyphrases

• ANSYS Simulation 50%
• Beam Resonators 50%
• Dynamic Characterization 50%
• Electromechanical Resonator 50%
• Heterodyning 50%
• Interferometric Measurement 50%
• Multi-frequency 50%
• Nanoelectromechanical Devices 50%
• NEMS Resonator 100%
• Optical Characterization 100%
• Output Signal 50%
• Plate Resonator 50%
• Resonant Frequency 50%
• Signal Detection 50%
• Silicon-on-nothing 50%
• Simulation Prediction 50%
• Single Wafer 50%
• Size Reduction 50%
• Standard CMOS Technology 50%

Material Science

• Comminution 33%
• Microelectromechanical System 33%
• Resonator 100%
• Silicon 33%