Effect of low temperature and concentration KOH etching on high aspect ratio silicon structures

  • Thomas Defforge
  • , L. Coudron
  • , Gael Gautier
  • , Sebastien Kouassi
  • , Wilfried Vervisch
  • , Francois Tran Van
  • , Laurent Ventura

Research output: Contribution to journal › Article › peer-review

4 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effect of low temperature and concentration KOH etching on high aspect ratio silicon structures'. Together they form a unique fingerprint.

Keyphrases

Engineering

Material Science

Chemical Engineering