Abstract
A nanoscale positioning system for magnetic recording purpose has been designed and fabricated. A two-dimensional random-access of the sample is performed by inclining the two parallelograms with the aid of two multi-layer piezoelectric ceramic actuators. A so-called `displacement contracting' effect is used to enhance the positioning resolution. A positioning resolution of 1.6 nm with this stage has been achieved. This high-resolution, linearized and temperature-compensated system has the potential to address fundamental issues associated with recording at densities much greater than 10 Gbits/in2 (1.5 Gbits/cm2).
| Original language | English |
|---|---|
| Pages (from-to) | 313-316 |
| Journal | Sensors and Actuators A: Physical |
| Volume | 81 |
| Issue number | 1-3 |
| DOIs | |
| Publication status | Published - 1 Apr 2000 |
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