Abstract
This is the final part of a three-part series on micro-electromechanical systems (MEMS) sensor technology. In the first part, a general introduction to MEMS sensing was given including the underlying principles [1]. Biomedical MEMS sensors were described and the principles of bio-sensing in a typical set of biologically inspired sensors were presented. The second part discussed mechanical sensors and their applications [2]. Some important issues of MEMS sensors were addressed, including the need to compensate for environmental effects, the Casimir effect, harvesting of energy for self-powered sensors, and the subject of sensor selection.
Original language | English |
---|---|
Pages (from-to) | 16-20 |
Number of pages | 5 |
Journal | Instrumentation and Measurement Magazine |
Volume | 15 |
Issue number | 3 |
DOIs | |
Publication status | Published - Jun 2012 |