Recent Advances in MEMS Sensor Technology: Thermo-fluid and Electro-magnetic Devices

Farbod Khoshnoud, Clarence W. de Silva

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)
115 Downloads (Pure)

Abstract

This is the final part of a three-part series on micro-electromechanical systems (MEMS) sensor technology. In the first part, a general introduction to MEMS sensing was given including the underlying principles [1]. Biomedical MEMS sensors were described and the principles of bio-sensing in a typical set of biologically inspired sensors were presented. The second part discussed mechanical sensors and their applications [2]. Some important issues of MEMS sensors were addressed, including the need to compensate for environmental effects, the Casimir effect, harvesting of energy for self-powered sensors, and the subject of sensor selection.

Original languageEnglish
Pages (from-to)16-20
Number of pages5
JournalInstrumentation and Measurement Magazine
Volume15
Issue number3
DOIs
Publication statusPublished - Jun 2012

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