Surface Morphology Evolution Mechanisms of InGaN/GaN Multiple Quantum Wells with Mixture N2/H2-Grown GaN Barrier

Xiaorun Zhou, Taiping Lu, Yadan Zhu, Guangzhou Zhao, Hailiang Dong, Zhigang Jia, Yongzhen Yang, Yong Chen, Bingshe Xu

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Abstract

Surface morphology evolution mechanisms of InGaN/GaN multiple quantum wells (MQWs) during GaN barrier growth with different hydrogen (H2) percentages have been systematically studied. Ga surface-diffusion rate, stress relaxation, and H2 etching effect are found to be the main affecting factors of the surface evolution. As the percentage of H2 increases from 0 to 6.25%, Ga surface-diffusion rate and the etch effect are gradually enhanced, which is beneficial to obtaining a smooth surface with low pits density. As the H2 proportion further increases, stress relaxation and H2 over- etching effect begin to be the dominant factors, which degrade surface quality. Furthermore, the effects of surface evolution on the interface and optical properties of InGaN/GaN MQWs are also profoundly discussed. The comprehensive study on the surface evolution mechanisms herein provides both technical and theoretical support for the fabrication of high-quality InGaN/GaN heterostructures.

Original languageEnglish
Article number354
JournalNanoscale Research Letters
Volume12
DOIs
Publication statusPublished - 16 May 2017

Keywords

  • GaN barrier
  • Hydrogen
  • Interface
  • Surface

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