The Fabrication Process of 4000TPI Etched Servo Disk

Na Helian, Jiang Ling Zhang, Zhi Gang Wang, Lup Gan

Research output: Contribution to journalArticlepeer-review


A novel servo disk with 4000TPI track density has been successfully manufactured by using photolithographic technique. The test results by scanning electron microscope (SEM), vibration sample machine (VSM) and interference microscope show that the etched servo disk has achieved the expected aim.
Original languageEnglish
Pages (from-to)39-42
JournalMicroelectronics & Computer
Issue number1
Publication statusPublished - 1993


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