TY - JOUR
T1 - The Fabrication Process of 4000TPI Etched Servo Disk
AU - Helian, Na
AU - Zhang, Jiang Ling
AU - Wang, Zhi Gang
AU - Gan, Lup
PY - 1993
Y1 - 1993
N2 - A novel servo disk with 4000TPI track density has been successfully manufactured by using photolithographic technique. The test results by scanning electron microscope (SEM), vibration sample machine (VSM) and interference microscope show that the etched servo disk has achieved the expected aim.
AB - A novel servo disk with 4000TPI track density has been successfully manufactured by using photolithographic technique. The test results by scanning electron microscope (SEM), vibration sample machine (VSM) and interference microscope show that the etched servo disk has achieved the expected aim.
UR - http://caod.oriprobe.com/articles/45939332/The_Fabrication_Process_of_4000TPI_Etched_Servo_Disk.htm
UR - https://www.oriprobe.com/journals/wdzxyjsj/1993_1.html
UR - https://www.oriprobe.com/journals/wdzxyjsj.html
M3 - Article
SN - 1000-7180
SP - 39
EP - 42
JO - Microelectronics & Computer
JF - Microelectronics & Computer
IS - 1
ER -