The Fabrication Process of 4000TPI Etched Servo Disk

Na Helian; Jiang Ling Zhang; Zhi Gang Wang; Lup Gan

The Fabrication Process of 4000TPI Etched Servo Disk

Na Helian
, Jiang Ling Zhang
, Zhi Gang Wang
, Lup Gan

Research output: Contribution to journal › Article › peer-review

Abstract

A novel servo disk with 4000TPI track density has been successfully manufactured by using photolithographic technique. The test results by scanning electron microscope (SEM), vibration sample machine (VSM) and interference microscope show that the etched servo disk has achieved the expected aim.

Original language	English
Pages (from-to)	39-42
Journal	Microelectronics & Computer
Issue number	1
Publication status	Published - 1993

Cite this

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title = "The Fabrication Process of 4000TPI Etched Servo Disk",

abstract = "A novel servo disk with 4000TPI track density has been successfully manufactured by using photolithographic technique. The test results by scanning electron microscope (SEM), vibration sample machine (VSM) and interference microscope show that the etched servo disk has achieved the expected aim.",

author = "Na Helian and Zhang, \{Jiang Ling\} and Wang, \{Zhi Gang\} and Lup Gan",

year = "1993",

language = "English",

pages = "39--42",

journal = "Microelectronics \& Computer",

issn = "1000-7180",

publisher = "Microelectronics \& Computer",

number = "1",

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T1 - The Fabrication Process of 4000TPI Etched Servo Disk

AU - Helian, Na

AU - Zhang, Jiang Ling

AU - Wang, Zhi Gang

AU - Gan, Lup

PY - 1993

Y1 - 1993

N2 - A novel servo disk with 4000TPI track density has been successfully manufactured by using photolithographic technique. The test results by scanning electron microscope (SEM), vibration sample machine (VSM) and interference microscope show that the etched servo disk has achieved the expected aim.

AB - A novel servo disk with 4000TPI track density has been successfully manufactured by using photolithographic technique. The test results by scanning electron microscope (SEM), vibration sample machine (VSM) and interference microscope show that the etched servo disk has achieved the expected aim.

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M3 - Article

SN - 1000-7180

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EP - 42

JO - Microelectronics & Computer

JF - Microelectronics & Computer

IS - 1

ER -

The Fabrication Process of 4000TPI Etched Servo Disk

Abstract

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