TY - JOUR
T1 - The production of precision silicon micromachined non-spherical particles for aerosol studies
AU - Kaye, Paul H.
AU - Micheli, F.
AU - Tracey, M.C.
AU - Hirst, E.
AU - Gundlach, A.M.
N1 - Original article can be found at: http://www.sciencedirect.com/science/journal/00218502 Copyright Elsevier Ltd. [Full text of this article is not available in the UHRA]
PY - 1992
Y1 - 1992
N2 - A variety of accurately defined non-spherical particles have been produced in silicon dioxide and polycrystalline silicon using the process of silicon micromachining. The particles are of lengths 3μm, 4.5μm, 7.5μm, and 12μm, and of width 1.5μm, giving aspect ratios of 2, 3, 5, and 8:1. The particle thickness is 1.1μm or 1.7μm. This paper describes the micromachining and post-fabrication processing of the particles to render them in a form suitable for use in aerosol studies.
AB - A variety of accurately defined non-spherical particles have been produced in silicon dioxide and polycrystalline silicon using the process of silicon micromachining. The particles are of lengths 3μm, 4.5μm, 7.5μm, and 12μm, and of width 1.5μm, giving aspect ratios of 2, 3, 5, and 8:1. The particle thickness is 1.1μm or 1.7μm. This paper describes the micromachining and post-fabrication processing of the particles to render them in a form suitable for use in aerosol studies.
U2 - 10.1016/0021-8502(92)90384-8
DO - 10.1016/0021-8502(92)90384-8
M3 - Article
SN - 0021-8502
VL - 23
SP - 201
EP - 204
JO - Journal of Aerosol Science
JF - Journal of Aerosol Science
IS - Supp 1
ER -