The production of precision silicon micromachined non-spherical particles for aerosol studies

Paul H. Kaye, F. Micheli, M.C. Tracey, E. Hirst, A.M. Gundlach

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

A variety of accurately defined non-spherical particles have been produced in silicon dioxide and polycrystalline silicon using the process of silicon micromachining. The particles are of lengths 3μm, 4.5μm, 7.5μm, and 12μm, and of width 1.5μm, giving aspect ratios of 2, 3, 5, and 8:1. The particle thickness is 1.1μm or 1.7μm. This paper describes the micromachining and post-fabrication processing of the particles to render them in a form suitable for use in aerosol studies.
Original languageEnglish
Pages (from-to)201-204
JournalJournal of Aerosol Science
Volume23
Issue numberSupp 1
DOIs
Publication statusPublished - 1992

Fingerprint

Dive into the research topics of 'The production of precision silicon micromachined non-spherical particles for aerosol studies'. Together they form a unique fingerprint.

Cite this