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Thick Microporous Silicon Layers Etching Involving p(+)n Back Side Hole Injection in Highly Resistive n-Type Substrates
Loic Coudron, Gael Gautier, Benjamin Morillon, Sebastien Kouassi, Thomas Defforge, Laurent Ventura
Research output: Contribution to journal › Article › peer-review
2
Citations
(Scopus)